| dc.contributor.author | HATA, SATOSHI | |
| dc.contributor.author | SOSIATI, HARINI | |
| dc.contributor.author | KUWANO, NORIYUKI | |
| dc.contributor.author | ITAKURA, MASARU | |
| dc.contributor.author | NAKANO, TAKAYOSHI | |
| dc.contributor.author | UMAKOSHI, YUKICHI | |
| dc.date.accessioned | 2017-08-10T13:03:44Z | |
| dc.date.available | 2017-08-10T13:03:44Z | |
| dc.date.issued | 2006-03-01 | |
| dc.identifier.citation | 12 | en_US |
| dc.identifier.other | 10.1093/jmicro/dfl001 | |
| dc.identifier.uri | http://repository.umy.ac.id/handle/123456789/12711 | |
| dc.description.abstract | A plasma cleaner is usually used for removing carbonaceous debris from a specimen and preventing contamination during transmission electron microscopy (TEM) imaging and analysis. However, the plasma cleaner can be effectively used for thinning down damage layers on TEM specimens prepared by focused ion-beam (FIB) milling. By optimizing plasma treatment conditions, the quality of high-resolution images and diffraction patterns of the FIB-milled specimens has been remarkably improved using the plasma cleaner. | en_US |
| dc.description.sponsorship | Industrial Technology Research Program (Project: 03A47002) in 2003 from New Energy and Industrial Technology Development Organization (NEDO) of Japan and Nanotechnology Support Project of the Ministry of Education, Culture, Sports, Science and Technology (MEXT), Japan. | en_US |
| dc.language.iso | en | en_US |
| dc.publisher | OXFORD Academic | en_US |
| dc.subject | focused ion beam, surface damage, plasma cleaner, transmission electron microscopy | en_US |
| dc.subject | Research Subject Categories::TECHNOLOGY | en_US |
| dc.title | REMOVING FOCUSED ION-BEAM DAMAGES ON TRANSMISSION ELECTRON MICROSCOPY SPECIMENS BY USING A PLASMA CLEANER | en_US |
| dc.type | Article | en_US |
